Product
Product
Xceed MICRO │ AXION │ PRECION │ ARTION
Xceed MICRO │ AXION │ PRECION │ ARTION


Ultra-Precision 2D&3D AOI for Wafer Inspection

High-Resolution Color Image

Easy Teaching, Inspection Result Management

Interworking with EFEM

High PrecisionGranite X/Y/Z stage

8”, 12” Ringframe Wafer : Multi Load Port & Dual arm

StablePorous Vacuum Chuck

Inspection Items
Wafer Die(Chipping, Contamination, etc.), Bump(Height, Offset, Coplanarity, etc.)

Ultra-Precision 2D&3D AOI for Wafer Inspection

High-Resolution Color Image

Easy Teaching, Inspection Result Management

Interworking with EFEM

High Precision Granite X/Y/Z stage

8”, 12” Ringframe Wafer : Multi Load Port & Dual arm

Stable Porous Vacuum Chuck

Inspection Items Wafer Die (Chipping, Contamination, etc.), Bump (Height, Offset, Coplanarity, etc.)
