Product
Product
Xceed MICRO │ AXION │ PRECION │ ARTION
Xceed MICRO │ AXION │ PRECION │ ARTION
Ultra-Precision 2D&3D AOI for Wafer Inspection
High-Resolution Color Image
Easy Teaching, Inspection Result Management
Interworking with EFEM
High PrecisionGranite X/Y/Z stage
8”, 12” Ringframe Wafer : Multi Load Port & Dual arm
StablePorous Vacuum Chuck
Inspection Items
Wafer Die(Chipping, Contamination, etc.), Bump(Height, Offset, Coplanarity, etc.)
Ultra-Precision 2D&3D AOI for Wafer Inspection
High-Resolution Color Image
Easy Teaching, Inspection Result Management
Interworking with EFEM
High Precision Granite X/Y/Z stage
8”, 12” Ringframe Wafer : Multi Load Port & Dual arm
Stable Porous Vacuum Chuck
Inspection Items Wafer Die (Chipping, Contamination, etc.), Bump (Height, Offset, Coplanarity, etc.)
